Stage apparatus and method for producing circuit device utilizing the same
US6590633B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1998 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | Mar 25, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The stage apparatus can improve static and dynamic features by reducing the number of electrical wiring or tubes for air pressure disposed in a movable main stage member of a movable stage apparatus. The movable stage apparatus has a base structure body and a movable stage structure body. When the movable stage structure body is transferred on the base structure body to a position in which to exchange wafers, a receiving terminal part disposed on the movable stage structure body comes into contact with a feed terminal part disposed on the base structure body and a battery loaded on the movable stage structure body is charged with electric current supplied from the feed terminal part. When the stage structure body is apart from the position in which to exchange wafers, adsorption of the wafer loaded on the stage structure body is sustained electrically by utilizing the electricity of the battery. A control over the start of adsorption or the release thereof upon the action for exchanging wafers is effected in a wireless or wire coupler system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.