Toru Kiuchi
8Patents
8h-index
13Co-inventors
62Inventor score
Filing activity: Jun 12, 1992 → Feb 11, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6040096A | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Physics | 61 | Expired |
| US6590633B1 | Stage apparatus and method for producing circuit device utilizing the same | Electricity | 50 | Expired |
| US5894056A | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Physics | 49 | Expired |
| US5338062A | Side collision sensor system for side airbag apparatus | Performing Operations; Transporting | 36 | Expired |
| US6414743B1 | Exposure apparatus, exposure method using the same and method of manufacture of circuit device | Physics | 29 | Expired |
| US5392024A | Collision detection system | Performing Operations; Transporting | 29 | Expired |
| US5289231A | Apparatus for manufacturing disc medium | Physics | 22 | Expired |
| US6864955B2 | Stage apparatus, exposure apparatus and method for exposing substrate plate | Electricity | 20 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.