Stage assembly including a reaction assembly that is connected by actuators
US6603531B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 16, 2000 |
| Grant date | Aug 5, 2003 |
| Priority date | — |
| Expiry date | Nov 16, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B27/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). As provided herein, the reaction assembly (18) includes a first reaction mass (88) and a second reaction mass (90) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.