Laser-assisted silicide fuse programming
US6607945B2 · kind B2 · utility
4Cited by
2References
34Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 24, 2001 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Sep 14, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.