Inventor · Plano, TX, US

Ting Tsui

28Patents
10h-index
34Co-inventors
71Inventor score

Filing activity: Aug 10, 1998 → Sep 23, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US6339958B1 Adhesion strength testing using a depth-sensing indentation technique Physics 33 Expired
US6242790A Using polysilicon fuse for IC programming Electricity 31 Expired
US6489238B1 Method to reduce photoresist contamination from silicon carbide films Electricity 16 Expired
US6208030A Semiconductor device having a low dielectric constant material Electricity 16 Expired
US6780756B1 Etch back of interconnect dielectrics Electricity 15 Expired
US6023327A System and method for detecting defects in an interlayer dielectric of a semiconductor device Electricity 15 Expired
US6498112B1 Graded oxide caps on low dielectric constant (low K) chemical vapor deposition (CVD) films Electricity 14 Expired
US6053034A Method for measuring fracture toughness of thin films Emerging Cross-Sectional Technologies 14 Expired
US7442597B2 Systems and methods that selectively modify liner induced stress Electricity 12 Expired
US6309942A STI punch-through defects and stress reduction by high temperature oxide reflow process Electricity 11 Expired
US6147507A System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer Emerging Cross-Sectional Technologies 9 Expired
US6583070B1 Semiconductor device having a low dielectric constant material Electricity 9 Expired
US6881665B1 Depth of focus (DOF) for trench-first-via-last (TFVL) damascene processing with hard mask and low viscosity photoresist Electricity 7 Expired
US6177802A System and method for detecting defects in an interlayer dielectric of a semiconductor device using the hall-effect Electricity 5 Expired
US7268073B2 Post-polish treatment for inhibiting copper corrosion Electricity 5 Expired
US6607945B2 Laser-assisted silicide fuse programming Electricity 4 Expired
US6320403A Method of determining the doping concentration and defect profile across a surface of a processed semiconductor material Emerging Cross-Sectional Technologies 3 Expired
US7678713B2 Energy beam treatment to improve packaging reliability Electricity 3 Active
US7282436B2 Plasma treatment for silicon-based dielectrics Electricity 2 Expired
US6407558B2 Method of determining the doping concentration across a surface of a semiconductor material Emerging Cross-Sectional Technologies 2 Expired
US6208154A Method of determining the doping concentration across a surface of a semiconductor material Emerging Cross-Sectional Technologies 1 Expired
US7341941B2 Methods to facilitate etch uniformity and selectivity Electricity 1 Expired
US7342315B2 Method to increase mechanical fracture robustness of porous low k dielectric materials Electricity 1 Expired
US7087518B2 Method of passivating and/or removing contaminants on a low-k dielectric/copper surface Electricity 0 Expired
US7939400B2 Systems and methods that selectively modify liner induced stress Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.