Method and device for reducing capacitive and magnetic effects from a substrate by using a schottky diode under passive components
US6608362B1 · kind B1 · utility
5Cited by
8References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 20, 2002 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Aug 20, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/811
Abstract
A method of fabricating high quality passive components having reduced capacitive and magnetic effects by using a Schottky diode underlying the passive components in the manufacture of integrated circuits is described. A Schottky diode is formed completely covering an active area where passive devices are to be formed. The Schottky diode is covered with a dielectric layer. Passive components are formed overlying the dielectric layer wherein the Schottky diode reduces substrate noise resulting in high quality of the passive components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.