Single point high resolution time resolved photoemission microscopy system and method
US6608494B1 · kind B1 · utility
113Cited by
12References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1998 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Dec 4, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system providing single point high spatial and timing resolution for photoemission microscopy of an integrated circuit. A microscope having an objective lens forming a focal plane is arranged to view the integrated circuit, and an aperture element having an aperture is optically aligned in the back focal plane of the microscope. The aperture element is positioned for viewing a selected area of the integrated circuit. A photo-diode optically aligned with the aperture to detect photoemissions when test signals are applied to the integrated circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.