Loading and unloading station for semiconductor processing installations

US6609876B2 · kind B2 · utility

Assignee

• Brooks Automation GmbH · US

Inventors

• Andreas Mages · Jena, DE
• Werner Scheler · Jena, DE
• Herbert Blaschitz · Munich, DE
• Alfred Schulz · Oberriexingen, DE
• Heinz Schneider · Düren, DE

Key dates

• Filing date: Nov 13, 2001
• Grant date: Aug 26, 2003
• Expiry date: Nov 13, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/14
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The inventio…