Dual post centrifugal wafer clip for spin rinse dry unit
US6612014B1 · kind B1 · utility
11Cited by
16References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2000 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Jul 12, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49998
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and associated method for securing a wafer to a SRD spider, the SRD spider has a plurality of spider arms. The apparatus includes a plurality of spaced surfaces disposed on a distal end of one of the spider arms, each of the surfaces being spaced perpendicularly from the longitudinal axis of the spider arm. In one aspect, the two surfaces are positioned to limit production of a wedging force between that spaced surface and the wafer. In one embodiment, a post at least partially defines each one of the plurality of spaced surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.