Capacitor over plug structure
US6614642B1 · kind B1 · utility
1Cited by
6References
17Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Sep 19, 2002 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Sep 19, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/716
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A capacitor over plug (COP) structure is disclosed. The COP avoids the step which is created in conventional COP structures, which adversely impacts the properties of the capacitor. In one embodiment, the step is avoided by providing a plug having upper and lower portions. The upper portion, which is coupled to the bottom electrode of the capacitor, has substantially the same surface area as the bottom electrode. A barrier layer can be provided between the plug and bottom electrode to avoid oxidation of the plug material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.