Inventor · Yokohama, JP

Andreas Hilliger

22Patents
6h-index
28Co-inventors
61Inventor score

Filing activity: Sep 18, 2001 → Mar 9, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US6677630B1 Semiconductor device having ferroelectric film and manufacturing method thereof Emerging Cross-Sectional Technologies 8 Expired
US6611449B1 Contact for memory cells Electricity 7 Expired
US6787831B2 Barrier stack with improved barrier properties Electricity 7 Expired
US7071506B2 Device for inhibiting hydrogen damage in ferroelectric capacitor devices Electricity 6 Expired
US6800890B1 Memory architecture with series grouped by cells Electricity 6 Expired
US6724026B2 Memory architecture with memory cell groups Electricity 6 Expired
US6815234B2 Reducing stress in integrated circuits Electricity 4 Expired
US6855565B2 Semiconductor device having ferroelectric film and manufacturing method thereof Electricity 4 Expired
US6946735B2 Side-wall barrier structure and method of fabrication Electricity 4 Expired
US7042705B2 Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing Electricity 3 Expired
US6906908B1 Semiconductor device and method of manufacturing the same Electricity 3 Expired
US6858442B2 Ferroelectric memory integrated circuit with improved reliability Electricity 3 Expired
US7084027B2 Method for producing an integrated circuit Electricity 2 Expired
US7378700B2 Self-aligned V0-contact for cell size reduction Electricity 1 Expired
US7061035B2 Self-aligned V0-contact for cell size reduction Electricity 1 Expired
US7101785B2 Formation of a contact in a device, and the device including the contact Electricity 1 Expired
US6614642B1 Capacitor over plug structure Electricity 1 Expired
US7042037B1 Semiconductor device Electricity 1 Expired
US6839220B1 Multi-layer barrier allowing recovery anneal for ferroelectric capacitors Electricity 1 Expired
US7009230B2 Barrier stack with improved barrier properties Electricity 0 Expired
US7002196B2 Ferroelectric capacitor devices and FeRAM devices Electricity 0 Expired
US6621683B1 Memory cells with improved reliability Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.