Patent · US Expired

Nitrogen analogs of copper II &bgr;-diketonates as source reagents for semiconductor processing

US6620956B2 · kind B2 · utility

59Cited by
17References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2002
Grant dateSep 16, 2003
Priority date—
Expiry dateApr 12, 2022

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC07C251/08
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

Nitrogen containing analogs of Copper II &bgr;-diketonates which analogs are more stable source reagents for copper deposition when substantially free of solvents of excess ligands. The nitrogen containing analogs replace —O— with —N(R″)— wherein R″ is an alkyl group having from one to four carbon atoms. Replacement of each —O— is preferred although replacement of one —O— per cyclic ring is sufficient to improve stability of the copper source reagents. The source reagent can be purified by sublimation to remove solvents and excess ligands prior to semiconductor processing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.