Termination structure for superjunction device
US6621122B2 · kind B2 · utility
41Cited by
2References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 3, 2002 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Jul 3, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/256
Abstract
A termination structure for a superjunction device on which the net charge between P pylons in an N− termination region is intentionally unbalanced and is negative. The P pylons in the termination area are further non-uniformly located relative to those in the active area. A field ring which is an extension of the source electrode terminates at a radial mid point of the termination region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.