Method for optimizing probe card analysis and scrub mark analysis data
US6621262B2 · kind B2 · utility
5Cited by
7References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 2, 2002 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Jul 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for quantitatively determining probe card errors relying on merging data sets from a probe card analysis machine and a scrub mark analysis machine. Minimizing error values related to the data sets provides an indication of probe card/probe machine combination tolerance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.