Module based flexible semiconductor test system
US6629282B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 1999 |
| Grant date | Sep 30, 2003 |
| Priority date | — |
| Expiry date | Nov 5, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31907
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor test system for testing semiconductor devices, and particularly, to a semiconductor test system having a plurality of different types of tester modules for easily establishing different semiconductor test systems. The semiconductor test system includes two or more tester modules whose performances are different from one another, a test head to accommodate the two or more tester modules having different performances, means provided on the test head for electrically connecting the tester modules and a device under test, and a host computer for controlling an overall operation of the test system by communicating with the tester modules through a tester bus. One type of the performances of the tester module is high speed high timing accuracy while other type of performance is low speed low timing accuracy. Each event tester module includes a tester board which is configured as an event based tester.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.