Self-cleaning technique for contamination on calibration sample in SEM
US6635874B1 · kind B1 · utility
5Cited by
8References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2000 |
| Grant date | Oct 21, 2003 |
| Priority date | — |
| Expiry date | Jan 23, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides SEM calibration standards, and associated SEM systems and SEM calibration methods, that are self-cleaning with respect to electron beam deposited carbon. The calibration standards have coatings containing a transition metal oxide. The coatings facilitate oxidation of deposited carbon, whereby carbon buildup can be stopped or reversed. By providing a mechanism to mitigate carbon buildup, calibration standards provided by the present invention achieve high accuracy, high durability, and low cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.