Patent · US Expired

Methods of forming semiconductor constructions

US6638834B2 · kind B2 · utility

273Cited by
18References
16Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 15, 2002
Grant dateOct 28, 2003
Priority date
Expiry dateOct 15, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D88/01
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The invention includes a method of forming a semiconductor construction. A first substrate is provided which comprises silicon-containing structures separated from one another by an insulative material. The silicon-containing structures define an upper surface. A second semiconductor substrate is provided which comprises a monocrystalline material having a damage region therein. The second semiconductor substrate is bonded to the silicon-containing structures of the first substrate at the upper surface. The monocrystalline material is then cleaved along the damage region. The invention also encompasses a semiconductor construction comprising a first substrate having silicon-containing structures separated from one another by an insulative material, and a second substrate comprising a monocrystalline material. The silicon-containing structures of the first substrate define an upper surface, and the monocrystalline material of the second substrate is bonded over the silicon-containing structures at the upper surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.