Charge compensation semiconductor configuration

US6639272B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Dirk Ahlers · Hersbruck, DE
• Armin Willmeroth · Friedberg, DE
• Hans Weber · Villach, AT

Key dates

• Filing date: Apr 1, 2002
• Grant date: Oct 28, 2003
• Expiry date: Apr 1, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D62/111

Abstract

Charge balancing is achieved in a compensation component by creating compensation regions having different thickness. In this manner, the ripple of the electric field can be chosen to have approximately the same magnitude in all of the compensation regions.