Segmented contactor
US6640415B2 · kind B2 · utility
121Cited by
83References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2002 |
| Grant date | Nov 4, 2003 |
| Priority date | — |
| Expiry date | Jul 25, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.