Integrated circuit configuration having at least two capacitors and method for manufacturing an integrated circuit configuration

US6646299B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Josef Willer · Riemerling, DE
• Christofer Hierold · Munich, DE

Key dates

• Filing date: Apr 19, 2002
• Grant date: Nov 11, 2003
• Expiry date: Apr 19, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/716

Abstract

A first capacitor electrode and at least part of a second capacitor electrode of a capacitor are produced in depressions of an auxiliary layer by electroplating. The auxiliary layer is then removed and at least partially replaced by a capacitor dielectric. The first capacitor electrode and the part of the second capacitor electrode may be composed of a metal, for example platinum. The capacitor dielectric can be composed, for example, of barium-strontium-titanate.