System and method to control planar motors
US6650079B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 1, 2001 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | Jun 1, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20201
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for controlling and positioning a two-dimensional electric motor is disclosed. The electric motor has a coil array and a magnet array. The method controls the motor in two directions in the plane of the magnet array and about a third direction generally orthogonal to the plane. The method includes: determining currents for generating the desired forces, determining a resultant torque that would be generated from applying the determined currents, determining current adjustments to compensate for the resultant torque, and applying a current equal to the sum of the determined currents and the current adjustments to the coils to interact with the magnetic fields of the magnet array. The currents are applied to the portion of the coil array within the magnetic field of the magnet array, including those coils which are only partially within the magnetic field of the magnet array. Alternatively, the currents could be applied to all of the coils. Applying the current to all of the coils requires more electrical power, but uses for amplifiers so the electronics are simpler and less expensive. The method of the present invention may be used in applications such as positioning wafers…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.