Patent · US Expired

Focusing-device for the radiation from a light source

US6655808B2 · kind B2 · utility

6Cited by

3References

16Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Martin Antoni · Aalen, DE
Frank Melzer · Utzmemmingen, DE
Andreas Seifert · Aalen, DE
Wolfgang Singer · Aalen, DE

Key dates

Filing date	Sep 10, 2001
Grant date	Dec 2, 2003
Priority date	—
Expiry date	Oct 9, 2021

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/30
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.