Cooling of voice coil motors in lithographic projection apparatus
US6657204B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2001 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Feb 24, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/0356
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use in a lithographic projection apparatus comprising:a radiation system for supplying a projection beam of radiation;a first object table for holding a mask;a second object table for holding a substrate;a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and preferably is of a monolithic construction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.