Picosecond imaging circuit analysis probe and system
US6657446B1 · kind B1 · utility
18Cited by
16References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1999 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Sep 30, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus, system, and method are provided for testing an integrated circuit with a probe card having optical fibers. The optical fibers of the probe card are fixed in alignment with test structures in the integrated circuit, and each optical fiber is coupled to an avalanche photo-diode for measuring photoemissions from the test structures. The photoemissions can be analyzed to verify correct circuit behavior. The optical fibers can be alternatives or complements to electrically conductive probes of the probe card.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.