Method for two dimensional adaptive process control of critical dimensions during spin coating process
US6662466B2 · kind B2 · utility
16Cited by
8References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2001 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Dec 11, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D1/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.