Carrier head with a substrate detector
US6663466B2 · kind B2 · utility
32Cited by
18References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1999 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Nov 17, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/30625
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.