Method and apparatus for optimizing downstream uniformity
US6665623B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2002 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Jul 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method includes measuring a characteristic of a workpiece at a plurality of locations. A uniformity profile is generated based on the characteristic measurements. At least one acceptable region of the workpiece is identified based on the uniformity profile. At least one unacceptable region of the workpiece is identified based on the uniformity profile. The uniformity profile is filtered to remove at least a portion of the characteristic measurements associated with the second unacceptable region. At least one parameter of an operating recipe for performing a process on the workpiece is determined based on the filtered uniformity profile.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.