Triple damascene fuse
US6667533B2 · kind B2 · utility
17Cited by
5References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2002 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Mar 12, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a conductive fuse for a semiconductor device, comprising: a pair of contact portions integrally connected to a fusible portion by connecting portions; the contact portions thicker than the connecting portions and the connecting portions thicker than the fusible portion; a first dielectric under the connecting portions and the fusible portion and extending between the pair of contact portions; and a second dielectric between the first dielectric and the fusible portion, the second dielectric extending between the connecting portions and defining the length of the fusible portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.