Probe card with pyramid shaped thin film contacts
US6672876B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 7, 2000 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Jan 20, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01R2201/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is a probe card comprising a probe having at thin film-like frame-like base section formed along the lower circumferential surface of an imaginary pyramid having at least a pyramidal top portion, a contact terminal section formed along the outer circumferential surface of the top portion of the imaginary pyramid, and at least one thin film-like joining section having a predetermined shape and serving to join the contact terminal section to the base section. The probe having a triangular pyramidal or conical shape as required.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.