Treatment of hazardous gases in effluent
US6673323B1 · kind B1 · utility
15Cited by
39References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2000 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Mar 24, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4412
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for reducing hazardous gases exhausted from a process chamber includes an effluent gas treatment system with a gas energizing reactor and an additive gas source. Additive gas comprising reactive gas is introduced into the effluent from the process chamber in a volumetric flow rate in relation to the hazardous gas content in the effluent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.