Method and apparatus for determining a sampling plan based on defectivity
US6687561B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2002 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | May 22, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method includes processing a plurality of workpieces in accordance with an operating recipe. A defectivity metric is determined based on the operating recipe. A sampling plan for measuring a characteristic of selected workpieces processed using the operating recipe is determined based on the defectivity metric. A manufacturing system includes a process tool and a sampling controller. The process tool is configured to process a plurality of workpieces in accordance with an operating recipe. The sampling controller is configured to determine a defectivity metric based on the operating recipe and determine a sampling plan for measuring a characteristic of selected workpieces processed using the operating recipe based on the defectivity metric.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.