Patent · US Expired

Multi-process system with pivoting process chamber

US6691720B2 · kind B2 · utility

5Cited by

21References

37Claims

0Family size

Assignee

Semitool, Inc. · US

Inventors

Eric J. Bergman · Kalispell, US
Dana Scranton · Kalispell, US
Eric Lund · Kent, US
Gil Lund · Kent, US

Key dates

Filing date	Jul 16, 2001
Grant date	Feb 17, 2004
Priority date	—
Expiry date	Jul 16, 2021

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S134/902
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.