Template for room temperature, low pressure micro-and nano-imprint lithography

US6696220B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• Todd C. Bailey · Poughkeepsie, US
• Byung-Jin Choi · Round Rock, US
• Matthew E. Colburn · Hopewell Junction, US
• S. Sreenivasan · Austin, US
• C. Grant Willson · Austin, US
• John Ekerdt · Austin, US

Key dates

• Filing date: Oct 12, 2001
• Grant date: Feb 24, 2004
• Expiry date: Dec 11, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/887
• WIPO field: Other special machines
• WIPO sector: Mechanical engineering

Abstract

Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.