Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
US6698728B1 · kind B1 · utility
23Cited by
7References
21Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 6, 2002 |
| Grant date | Mar 2, 2004 |
| Priority date | — |
| Expiry date | Jul 18, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler (1) to a plurality of reactor sites (12, 14, 16, 18, 20) wherein a carrier gas (2) is introduced into the container (1) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites (12, 14, 16, 18, 20). The gaseous mixture may be stored in a reservoir (9) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.