Oscillation damping system

US6700715B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Franz Sorg · Aalen, DE
• Stefan Xalter · Oberkochen, DE
• Michael Muehlbeyer · Aalen, DE
• Bernhard Gellrich · Aalen, DE
• Frank Melzer · Utzmemmingen, DE
• Thomas Ittner · Aalen, DE

Key dates

• Filing date: Dec 11, 2001
• Grant date: Mar 2, 2004
• Expiry date: Dec 11, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/646
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

In an oscillation damping system, the oscillations which act on an optical element in an imaging device, in particular on deformation-decoupled mounts and manipulators in a projection illumination arrangement, in particular in a projection objective for microlithographic projection exposure objective lithography, are detected by sensors, by actuators waves with same or at least similar frequencies and amplitudes of anti-phases to the disturbing oscillations are generated and introduced in said mount.