Clean room having an escalator, and method of transporting a semiconductor device therein
US6705450B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 22, 2001 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Mar 24, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67724
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a clean room having a plurality of floors of different levels, an escalator is disposed between the plurality of floors for transporting an article between the floors. A self-propelled vehicle is used for transporting an article between floors. The self-propelled vehicle and the article are loaded on a step of the escalator. The vehicle and the article are held on the step from above the article by means of a holding section. The holding section assists loading of the vehicle onto the escalator through the article in the vicinity of an entrance gate of the escalator and assists unloading of the vehicle from the escalator in the vicinity of an exit gate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.