Patent · US Expired

Device to generate excited/ionized particles in a plasma

US6706141B1 · kind B1 · utility

6Cited by

9References

16Claims

0Family size

Assignee

R3T GmbH Rapid Reactive Radicals Technology · DE

Inventors

Heinz Steinhardt · Kottingbrunn, AT
Alexander Gschwandtner · Hersbruck, DE
Josef Mathuni · Munich, DE

Key dates

Filing date	Jul 21, 2000
Grant date	Mar 16, 2004
Priority date	—
Expiry date	Jul 21, 2020

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/46
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A device to generate excited and/or ionized particles in plasma with a generator to generate an electromagnetic wave and at least one plasma zone, in which the excited and/or ionized particles are formed by the electromagnetic wave. The plasma zone is formed in an interior chamber of a conductor for the electromagnetic wave.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.