Heinz Steinhardt
3Patents
2h-index
5Co-inventors
37Inventor score
Filing activity: Aug 29, 1994 → Jun 12, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5489362A | Method for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energy | Fixed Constructions | 21 | Expired |
| US6706141B1 | Device to generate excited/ionized particles in a plasma | Electricity | 6 | Expired |
| US7665416B2 | Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.