Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems
US6707545B1 · kind B1 · utility
33Cited by
59References
32Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 6, 2000 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Sep 16, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention generally provides an apparatus and a method for inspecting a substrate in a processing system. More specifically, optical signal routing methods and apparatus provide multiple inspection collection points on a semiconductor processing system. In one aspect, an optical inspection system comprises a light source and an optical receiving device, such as a CCD camera, to illuminate and inspect a substrate for various optical signatures. A plurality of optical inspection systems are connected to a signal switching device, such as a multiplexer, which operates to route a particular signal to a detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.