Reginald Hunter
25Patents
16h-index
9Co-inventors
70Inventor score
Filing activity: Nov 9, 1992 → Dec 19, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6244121A | Sensor device for non-intrusive diagnosis of a semiconductor processing system | Emerging Cross-Sectional Technologies | 131 | Expired |
| US6468816B2 | Method for sensing conditions within a substrate processing system | Emerging Cross-Sectional Technologies | 52 | Expired |
| US6630995B1 | Method and apparatus for embedded substrate and system status monitoring | Physics | 51 | Expired |
| US7012684B1 | Method and apparatus to provide for automated process verification and hierarchical substrate examination | Physics | 42 | Expired |
| US6721045B1 | Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques | Physics | 36 | Expired |
| US6707545B1 | Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems | Electricity | 33 | Expired |
| US6026896A | Temperature control system for semiconductor processing facilities | Mechanical Engineering; Lighting; Heating | 28 | Expired |
| US6707544B1 | Particle detection and embedded vision system to enhance substrate yield and throughput | Physics | 27 | Expired |
| US6693708B1 | Method and apparatus for substrate surface inspection using spectral profiling techniques | Electricity | 27 | Expired |
| US6882416B1 | Methods for continuous embedded process monitoring and optical inspection of substrates using specular signature analysis | Physics | 27 | Expired |
| US7331250B2 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | Emerging Cross-Sectional Technologies | 26 | Active |
| US6895831B2 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6697517B1 | Particle detection and embedded vision system to enhance substrate yield and throughput | Physics | 21 | Expired |
| US6813032B1 | Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques | Physics | 21 | Expired |
| US6642853B2 | Movable wireless sensor device for performing diagnostics with a substrate processing system | Emerging Cross-Sectional Technologies | 19 | Expired |
| US7434485B2 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | Emerging Cross-Sectional Technologies | 16 | Active |
| US6677166B2 | Method for confirming alignment of a substrate support mechanism in a semiconductor processing system | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5260563A | Compact laser warning receiver | Physics | 12 | Expired |
| US6805137B2 | Method for removing contamination particles from substrates | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6779226B2 | Factory interface particle removal platform | Electricity | 6 | Expired |
| US6725564B2 | Processing platform with integrated particle removal system | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6878636B2 | Method for enhancing substrate processing | Electricity | 4 | Expired |
| US6684523B2 | Particle removal apparatus | Electricity | 4 | Expired |
| US6803998B2 | Ultra low cost position and status monitoring using fiber optic delay lines | Physics | 2 | Expired |
| US7969465B2 | Method and apparatus for substrate imaging | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.