Method and apparatus for accessing microelectronic workpiece containers
US6717171B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2001 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Jan 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for handling microelectronic workpieces initially positioned in a container. The container can be changeable from a first configuration where the microelectronic workpiece is generally inaccessible within the container to a second configuration where the microelectronic workpiece is accessible for removal from the container. The apparatus can include a container access device positionable proximate to an aperture of an enclosure that at least partially encloses a region for handling a microelectronic workpiece. The container access device can be movably positioned proximate to the aperture to change the configuration of the container from the first configuration to the second configuration. A container support can be positioned proximate to the aperture and can be configured to move the container to a fixed, stationary position relative to the aperture when the container is in the second configuration. Accordingly, the microelectronic workpieces within the container can be less likely to be damaged by movement of the container. Instead, a workpiece transfer device can be configured to have a range of travel that allows it to access each of the microelectroni…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.