Patent · US Expired

Carrier head with flexible membranes to provide controllable pressure and loading area

US6722965B2 · kind B2 · utility

42Cited by

35References

17Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Steven M. Zuniga · Soquel, US
Hung Chih Chen · San Jose, US
Ming Kuie Tseng · San Jose, US

Key dates

Filing date	Jul 10, 2001
Grant date	Apr 20, 2004
Priority date	—
Expiry date	Oct 8, 2021

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B49/16
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a controllable load to a substrate in an area with a controllable inner diameter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.