Method for assessing the reliability of interconnects
US6725433B1 · kind B1 · utility
15Cited by
7References
20Claims
0Family size
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Key dates
| Filing date | Sep 24, 2002 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Dec 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2858
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A methodology for testing interconnect structures includes testing a number of short line interconnects having the same length and different reservoir sizes. By measuring and comparing the stress values on the interconnects, a relationship between reservoir area and jLcrit may be obtained. This information may then be used to more accurately assess the reliability of an interconnect and to design more reliable interconnects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.