Systems and methods for forming strontium- and/or barium-containing layers
US6730164B2 · kind B2 · utility
110Cited by
6References
60Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2002 |
| Grant date | May 4, 2004 |
| Priority date | — |
| Expiry date | Aug 28, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/682
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming (and apparatus for forming) a layer, such as a strontium titanate, barium titanate, or barium-strontium titanate layer, on a substrate by employing a vapor deposition method, particularly a multi-cycle atomic layer deposition process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.