Patent · US Expired

Method and apparatus for testing a substrate

US6730906B2 · kind B2 · utility

14Cited by

15References

28Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Matthias Brunner · Tauberbischofsheim, DE
Ralf Schmid · Karlsruhe, DE

Key dates

Filing date	Oct 15, 2001
Grant date	May 4, 2004
Priority date	—
Expiry date	Oct 15, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method and apparatus for testing a substrate, wherein a particle beam is directed onto the substrate and emitted secondary particles are detected with a detector and then evaluated. The location of the site at which the secondary particles are emitted on the substrate relative to the position of the detector is taken into consideration during testing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.