Solder jointing system, solder jointing method, semiconductor device manufacturing method, and semiconductor device manufacturing system
US6732911B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2001 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Oct 27, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/3489
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is provided a chamber open to the outside through openings through which a solder-adhered object is passed and the chamber having a heating/melting area, a carrying mechanism for carrying the solder-adhered object into the heating/melting area, a formic-acid supplying means for supplying a formic acid into the heating/melting area, an exhausting means for exhausting a gas from the heating/melting area and its neighboring area to create a lower pressure area in the heating/melting area as compared to the pressure of outside the chamber, heating means for heating directly or indirectly the solder-adhered object in the heating/melting area, and an air-stream suppressing means for disturbing a gas flow between the heating/melting area and the carrying areas. Accordingly, there can be provided a solder jointing system for jointing solder layers of a semiconductor device, an electronic device, or the like to the wirings or the pads, which is capable of having a high processing ability and preventing re-oxidation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.