Patent · US Expired

Process for fabricating a capacitor within an integrated circuit, and corresponding integrated circuit

US6734483B2 · kind B2 · utility

3Cited by
4References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 17, 2001
Grant dateMay 11, 2004
Priority date
Expiry dateAug 17, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76895
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A production of a capacitor includes the simultaneous production, in at least part of an intertrack insulating layer (3) associated with a given metallization level, on the one hand, of the two electrodes (50, 70) and of the dielectric layer (60) of the capacitor and, on the other hand, of a conducting trench (41) which laterally extends the lower electrode of the capacitor, is electrically isolated from the upper electrode and has a transverse dimension smaller than the transverse dimension of the capacitor, and the production, in the interlevel insulating layer (8) covering the intertrack insulating layer, of two conducting pads (80, 81) which come into contact with the upper electrode of the capacitor and with the conducting trench, respectively.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.