Non-contact hysteresis measurements of insulating films
US6734696B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2002 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Nov 1, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/61
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Non-contact methods for determining a property of an insulating film are provided. One method includes measuring an amount of hysteresis in the insulating film without contacting the insulating film. The method also includes determining the amount of hysteresis in the insulating film. Computer-implemented methods for data analysis are also provided. One computer-implemented method includes determining a single numeric value representing an amount of hysteresis in an insulating film from electrical characteristics of the insulating film. The electrical characteristics are measured without contacting the insulating film. In addition, systems that include a measurement system and a computer-usable carrier medium are provided. The measurement system is configured to measure an amount of hysteresis in an insulating film without contacting the insulating film. The carrier medium includes program instructions, which are executable on a computer system for determining the amount of hysteresis in the insulating film using measurements from the measurement system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.