Device for manipulating an object for loading and unloading a clean room

US6736582B1 · kind B1 · utility

Assignee

• Brooks Automation GmbH · US

Inventors

• Andreas Mages · Jena, DE
• Andreas Birkner · Jena, DE
• Alfred Schulz · Oberriexingen, DE
• Klaus Schultz · Jena, DE

Key dates

• Filing date: Oct 9, 2001
• Grant date: May 18, 2004
• Expiry date: Oct 9, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/14
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining ergonomic benefits and to further improve the clean room conditions in the device. The device contains a stationary outer part (3) of a housing (2) as well as an inner part (4) that can extend telescopically from it and a receptacle element (11) in the roof area of the inner part (4). For the telescopic extension of the inner part and for the lowering of the receptacle element into the inner part, a common guide rail (16) and a common drive (20) are provided. The receptacle element connected to the drive engages with a driver of the inner part for the telescopic extension of the inner part by vertical upward movement and after reaching an access level (E2, E2), at which the inner part is secured, it can be lowered in the inner part. The inner part is flushed with an air flow coming from the clean room in the region of each level. The device is used for loading and unloading of clean rooms with objects that are transported in a container.