Distributed control system for semiconductor manufacturing equipment
US6736929B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2002 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Oct 10, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor workpiece processing tool includes process modules having a robot loading window and a manual loading window, and a control system for managing a production route defining movement of the workpiece among a number of the process modules. The control system includes a user interface through which an operator can define the production route and recipes to be performed on the workpiece in each of the process modules, a system controller for controlling execution of the production route, a process module controller associated with each of the process modules for controlling the processing of the workpiece in the process module, and a network connecting the control system components. Advantages of the invention include the ability to continue a production route while manually operating a process module. As a result, the tool may continue in operation while selected process module are tested, maintained or otherwise used to process workpieces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.